Nano-Patterning by Single-Atom Pen

Seizo Morita, Yoshiaki Sugimoto and Masayuki Abe

Abstract: At first, mechanical atom manipulation by atomic force microscope is introduced. Then, discovery of heterogeneous-atom interchange vertical manipulation, where tip apex works as an advanced interchangeable single-atom pen, is demonstrated. At last, by the construction of the embedded atom letters “Si”, possible high speed nano-pattering by an advanced interchangeable single-atom pen is revealed.

Abstract: Atomic Force Microscope, Heterogeneous-Atom Interchange Vertical Manipulation, Embedded Atom Letters, Advanced Interchangeable Single-Atom Pen, Room Temperature