Application of Electron Channeling Contrast Imaging in a Scanning Electron Microscope for Dislocation Analysis
Abstract: Single and clustering dislocations introduced into the deformed steel have been investigated using the back scattering electron signals in a scanning electron microscope. The development of the electron channeling contrast imaging technique has been simply reviewed, in which the inelastic scattering contrast has been discussed to understand the dislocation contrast observed by SEM, which is treated by a similar manner to that observed by TEM. With improvement of the control of incident electron beam direction, the ECCI technique will be widely applied to the field of study in materials.
Key words: SEM, ECCI, Backscattering electron, Dislocation, Steel