Development of analytical electron microscope attached with a microcalorimeter-type EDS -current state and future development-

Toru Hara, Keiichi Tanaka, Keisuke Maehata, Kazuhisa Mitsuda, Noriko Yamasaki, Mitsuaki Ohsaki, Shigemasa Ohta, Katsuaki Watanabe, Xiuzhen Yu, Yoshihiro Yamanaka, Takuji Ito

Abstract: A high energy-resolution energy dispersive spectrometer (EDS) utilizing a transition-edge-sensor (TES) microcalorimeter is developed for a transmission electron microscope (TEM). As the first step, we have attached a single-pixel TES system cooled by the cryogen-free cooling system to the TEM and obtained an energy resolution of 7.6eV at silicon Kα line without degrading the spatial resolution of the TEM.

Key words: Microcalorimeter, Transition-Edge-Sensor, TEM, high energy resolution, EDS