Observation of Crystal Structure Using Scanning Transmission Electron Microscopy
Abstract: Annular dark-field (ADF) imaging in scanning transmission electron microscopy (STEM) is an effective tool for the characterization of local crystal structure, because ADF imaging has high compositional sensitivity and intuitive interpretability. Here we review our results of high sensitivity and high precision analyses of crystal structures using STEM imaging. We show the validity and the limitation of incoherent imaging approximation of ADF imaging. We also show a recent result of spatially-resolved diffractometry, in which the diffraction patterns are fully acquired as a function of probe coordination.
Key words: scanning transmission electron microscopy, annular dark-field image, bright-field image, high resolution observation, incoherent imaging approximation