Development of 1.2MV Atomic-Resolution Holography Electron Microscope

Takeshi Kawasaki, Yoshio Takahashi, Tetsuya Akashi, Toshiaki Tanigaki, Toshio Onai, Keigo Kasuya, Tadao Furutsu, Hiroyuki Shinada and Nobuyuki Osakabe

Abstract: We have developed an aberration-corrected 1.2MV atomic-resolution holography electron microscope. In a high resolution observation mode, a 43 pm linear information transfer was confirmed and 44 pm Ga-Ga dumbbells in GaN[411] thin sample were resolved. In a field-free observation mode, a 0.24 nm linear information transfer was confirmed and images of Au{111} lattices were observed.

Key words: high-voltage electron microscope, aberration correction, cold field-emission gun