MICROSCOPY Vol.45▶No.3 2010
â– Researches Today

Delta Type Spherical Aberration Corrector

Hidetaka Sawada, Takeo Sasaki, Shuuichi Yuasa, Mitsuhisa Terao, Muneyuki Kawazoe, Tomohiro Nakamichi, Fumio Hosokawa, Toshikatsu Kaneyama, Yukihito Kondo, Koji Kimoto and Kazutomo Suenaga

Abstract: We have developed a spherical aberration correction system with three dodeca-poles. This system corrects a six-fold astigmatism, which generally limits a uniform phase area for image forming and probe forming system in an electron microscope with the conventional two-hexapole corrector. Experimental results showed compensation of a six-fold astigmatism as well as spherical aberration. We experimentally demonstrated high-resolution images with this corrector in a transmission electron microscope and a scanning transmission electron microscope at 30-kV and 60-kV acceleration.

Key words: Aberration correction, Low voltage, Higher order aberration,