Applications Using Ion-Beam Serial Milling and Reconstruction Technique in Life Science

Shoji Sadayama, Kaoru Murata and Naohisa Suzuki

Abstract: FIB/SEM (DualBeam^TM) is well known system as one of the best system for failure analysis in material science field. Ion-beam serial milling and reconstruction is a 3D reconstruction technique using a combination of DB and computed tomography technique. The technique is an important application of DB in material science field. Now it becomes popular in life science field gradually. Then we introduce its technique and application for life science field.

Key words: FIB, SEM, serial sectioning, iSR, life science