Split-Illumination Electron Holography

Toshiaki Tanigaki, Shinji Aizawa, Hyun Soon Park, Tsuyoshi Matsuda, Ken Harada and Daisuke Shindo

Abstract: Split-illumination electron holography has been developed by splitting coherent electron wave into two separate waves and illuminating them on two separated areas at the sample plane. With this method, it became possible to observe areas far from the sample edge and to reduce reference wave modulations due to the field around the sample by locating the reference wave far from the observation area. The advanced double-biprism type split-illumination electron holography without Fresnel fringes enables us to perform high-precision electromagnetic field analyses and opens up a new field of possibilities of holographic observations. In this report the developed methods are discussed in detail with their applications for studying magnetic flux distributions around pinning site of magnetic domain-wall in electrical steel and electrostatic potential distributions in n-type metal-oxide-semiconductor field-effect transistor (nMOSFET) located far from the sample edge.

Key words: Electron holography, Split-illumination, Electromagnetic field analysis, Fresnel fringes