KENBIKYO Vol.50▶No.1 2015
â– Feature Articles: Fundamentals of Simulation for Electron Microscopy

Image Simulation for High-Resolution Electron Microscopy

Kazuo Ishizuka

HREM Research Inc.

Abstract: Both (Conventional) Transmission Electron Microscopy (CTEM) and Scanning Transmission Electron Microscopy (STEM) give atomic resolution images under optimum conditions. However, in order to confirm the proposed structure based on the micrographs we need image simulation. Image simulation program will give some images, when we provide sample information and imaging conditions. However, CTEM and STEM images are generated from different signals, and the effect of the objective lens differs between two imaging modes. Thus, in order to evaluate the simulated images we have to understand the fundamental ideas as well as basic concepts of image simulation. In this article, I will explain, based on the multislice method, the fundamentals of high-resolution image simulation, especially the techniques to estimate elastic and thermal diffuse scattering and to handle partial coherence.

Key words: Electron Microscopy, Simulation, Multislice method, Thermal Diffuse Scattering, Partial Coherence