Wonder in SEM Image—Low Energy Electrons and Specimen Charging

Takashi Sekiguchi^a and Kazuhiro Kumagai^a,b

^aNational Institute for Materials Science
^bNational Institute of Advanced Industrial Science and Technology

Abstract: Scanning Electron Microscope (SEM) can show us various images reflecting not only the morphology but also their electrical character etc. We can choose the most suitable images among such various images according to the purpose. It is, however, necessary to clarify the origin or hindered physics beyond these images. We discuss the physics of scanning electron microscopy by clarifying the paradox of conflicting SEM images.

Key words: secondary electron, charge up, inlens SEM, nanosheet, insulator